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Products Etch/Ashing
Now You Have a Choice!!....

Lydall Affinity offers a complete line of chillers for Etch/Ashing process tools by:

  • AMAT
  • Lam Research
  • TEL
  • Novellus
  • Axcelis
  • Hitachi
  • Mattson
  • STS
  • Trikon
  • Alcatel


P/N 35799

P/N 35117

P/N 35892

P/N 36463

Non-Refrigerated
Heat Exchanger

  • 6,000 Watts @ 20ºC
  • +5 ºC to + 90ºC
  • 3.5 gpm @ 35 psi; 90 psi max
  • Process Heater
  • Sealless Pump / Sealed Reservoir

Single Channel

  • 700 Watts @ -40 ºC
  • -45ºC to + 90ºC
  • 3.5 gpm @ 35 psi; 90 psi max
  • Process Heater
  • Sealless Pump / Sealed Reservoir

Single Channel

  • 2,000 Watts @ 20ºC
  • +5ºC to + 90ºC
  • 3.5 gpm @ 35 psi; 90 psi max
  • Process Heater
  • Sealless Pump / Sealed Reservoir

Thermal Electric
(Units and Rack Sold Separately)


  • 1200 Watts @ 25 °C
  • -10 to +80 °C
  • 4 gpm @ 33 psi; 100 psi max
  • 19"L x 8.7"W x 24"H
  • Sealless Pump / Sealed Reservoir

All Units are UL(MET), CE and S2 Compliant, Temperature Ranges is Fluid Dependant
Communication Options Include: Compatible Process Fluids:
(Fluid type must be specified)
  • Analog
  • Water
  • RS 485, CHX & RS 232
  • HFE
  • DeviceNet
  • Fluorinert
  • GPIB
  • Glycol
  • Labview
  • Deionized Water
  • LON Works
  • Galden
 
  • Baysilone
 
  • Additional options


At Affinity, we stand behind our products 24/7. Sales, Service and Customer Support: 800.238.8581

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